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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • olishing pad used in polishing micro-device workpiecesUS703325123 Aug 200425 Apr 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS70371799 May 20022 May 2006Micron Technology, Inc.Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of micr
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