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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • oresistUS659306413 Oct 200015 Jul 2003Creo Inc.High resolution optical stepperUS66086812 Jul 200219 Ago 2003Nikon CorporationExposure method and apparatusUS664672216 Jul 200211 Nov 2003Micron Technology, Inc.Improvement in dimensions of circuitry and other structures formed on the semiconductor wafer; optical lithographic techniques used in the formation of integrated circuitsUS680362618 Jul 20021
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