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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The process may utilize, for example, hydrocarbon, metal or metalloid hydrocarbon feed compounds (typically feed gases) introduced with or without argon or other inert gas; energized into a plasma by direct current, radio frequency, microwave, enhanced plasmas or by hollow cathode magnetron energy sources.
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