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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A semiconductor device comprising: a substrate; an interlayer insulating film of an n-th layer (n is 1 or greater integer) provided above the substrate with including a first insulating film having a relative dielectric constant which is at most a predetermined value, and a second insulating film which is provided on a surface of the first insulating film and has a relative dielectric constant gre
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