prov:value
| - The material for the device electrodes 521 and 522 can be anything if it has conductivity, for example, metal or alloy such as Ni, Cr, Au, Mo, W, Pt, Ti, Al, Cu, Pd or printing conductor configured by metal or metal oxide such as Pd, Ag, Au, RuO2, Pd???Ag and glass, semiconductor material such as polysilicon, and transparent conductor such as In2O3???SnO2 (FIG. 13 a).
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