FIGS. 14A-14C are diagrams for explaining a dicing step in the micro-oscillator manufacturing method of the second embodiment of the present invention, wherein FIG. 14A is a top plan view in the dicing step, FIG. 14B is an E-E??? sectional view of FIG. 14A in the dicing step, and FIG. 14C is a D-D??? sectional view of FIG. 14A in the dicing step.