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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The first and second support parts 410 a and 410 b may be coated with material such as polytetrafluoroethylene or polyetheretherketone, for example, to prevent damage to the bottom surface of the first substrate 510 and an electrically conducting material to discharge any static electricity generated on the first substrate 510.
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