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  • 2), the groups of by the following formulas (13) to (18), a methyl group, ethyl group, norbornyl group, tetracyclodecanyl group, and the like can be given. [0192] wherein R10 individually represents a fluorine atom, fluoroalkyl group having 1-10 carbon atoms, hydrogen atom, halogen atom other than fluorine atom, alkyl group having 1-10 carbon atoms, or monovalent organic group having an acid-disso
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