About: isa:163195568   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • A chemical-mechanical polishing process, comprising the steps of: providing a high pH solution; and applying the solution to a workplace to be polished with a polishing pad, at least a portion of the polishing pad being impregnated with particles of a catalyst, wherein the catalyst is a metal selected from the group consisting of platinum, silver, palladium, copper, rhodium, nickel, and iron.
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