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  • 06Applied MaterialsProcess control in electrochemically assisted planarizationUS7074114Jan 16, 2003Jul 11, 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7112270Jun 6, 2003Sep 26, 2006Applied Materials, Inc.Algorithm for real-time process control of electro-polishingUS7115024 *Jan 5, 2005Oct 3, 2006
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