Description
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:23086796
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An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
The vias 74 are filled with a conductive material such as tungsten or aluminum, to form interconnects 92 between the device features 62 onthe substrate 60 and other features (not shown) that will be subsequently fabricated on the top surface 71.
prov:wasQuotedFrom
patentgenius.com
is
prov:wasDerivedFrom
of
isap:62320233
isap:57446322
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