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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • nsisting of the function -KEp or the function -K?????(Ei/Si2)/??(1/Si2) where K is a coefficient and the first-mentioned function is selected where a maxima or a minima exists between the ends of a edge and the second mentioned function is selected where the distance values exhibit an inclination relative to the edge; and correcting each edge position of said exposure pattern according to an outpu
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