ith a compound of Formula 3 wherein R??? is an alkyl, aryl or acyl group, in the presence of a base to form a compound of Formula 4; wherein X is a F or Cl; and R??? is an alkyl, aryl or acyl group, c) reacting the compound of Formula 4 with at least one phosphoryl halide and then hyrdolyzing to form a compound of Formula 5; wherein X is a F or Cl; and R??? is an alkyl, aryl or acyl group, d) reac