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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • in which an etching process takes place including load-locking means for suppressing residual gas contamination and an associated preparation chamber for the introduction of a substrate to be etched into said main chamber; (b) a temperature controlled tiltable stage for receiving and holding a substrate to be etched, said stage being movable between said preparation chamber means and said main cha
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