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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • Preferably, the tool activity information includes information, such as begin run events, end run events, engineering experiment events, begin process events, end process events, down to maintenance events, down for preventative maintenance events, down for repair events, failures, assists, number of wafers submitted to the tool for processing, number of wafers successfully processed, number of wa
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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