Preferred heat-up conditions and associated process parameters include nitrogen species (NH3, Amines, N2, etc.) at partial pressures in the range of from about 1 torr to about 1000 torr, a ramp time of from about 1 minute to about 1000 minutes, temperature ramp rates in the range of from about 10??? C. per minute to about 1000??? C. per minute, and the use of an ambient including species such as H