prov:value
| - Such lasers include, but are not limited to, alternative lasers providing ultraviolet radiation, for example, solid state lasers, including frequency multiplied solid state lasers such as flash-lamp and diode pumped solid state lasers, including UV solid state lasers (approximately 193???215 nm) such as those disclosed in U.S. Pat. Nos. 5,144,630, 5,742,626, Borsuztky et al., ???Tunable UV Radiati
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