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  • Suitable acid scavengers can be The photoresist further includes a dissolution inhibitor of the formula (1) wherein R1 and R2 each independently is a hydroxyl group, a C1-8 hydroxyalkyl group, or a C3-8 hydroxycycloalkyl group; R3, R4 and R5 each independently is a hydrogen, a C1-8 hydroxyalkyl group, a C1-6 carboxylic acid or a C3-8 carboxylic acid ester; and k is an integer of 0, 1, 2, 3, 4, 5 o
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