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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The pattern includes squares, such as square 1565 a, that have sides of length 2 F. The pattern is aligned with underlying conductive portions 1563 a-c and STI structures 1567 a-d so that there is an offset between squares and STI structures 1567 a-d.
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