Perfluoroalkylalkyl silanes that are preferred in the practice of the present invention have the general formula Rm R'n SiX4-m-n, wherein R is a perfluoroalkylalkyl radical; m is 1, 2 or 3; n is 0, 1 or 2; and m+n is less than 4; R' is a vinyl or an alkyl radical, preferably methyl, ethyl, vinyl or propyl; and X is preferably a radical such as halogen, acyloxy, and/or alkoxy.