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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:367817048
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An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
The invention relates particularly to the structure of such an electrode and its use in an apparatus for plasma etching and chemical vapor deposition, hereinafter referred to as PECVD.
prov:wasQuotedFrom
google.com
is
prov:wasDerivedFrom
of
isap:353143976
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