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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • As a metal film for the light shielding layer 12 having such etching characteristics, a metal film mainly composed of metals such as tantalum (Ta), tungsten (W), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), aluminum (Al), and germanium (Ge) is available.
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