prov:value
| - Nozzle plate 12 and back substrate 18 may be silicon, glass, quartz, ceramics, or polymeric substrates such as plastics (polyamide, polymethylmethacrylate (PMMA), polycarbonate, polytetrafluoroethylene, Teflon???, polydimethylsiloxane (PDMS), polyvinylchloride (PVC), polysulfone, etc.).
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