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  • caustic scrubber; contacting purified vent gas with a membrane selectively permeable to tetrafluoromethane and perfluoroethaneUS5855647 *15 May 19975 Jan 1999American Air Liquide, Inc.Process for recovering SF6 from a gasUS5858065 *16 Jan 199712 Jan 1999American Air LiquideEffluent gases, e.g. from the semiconductor manufacturing process, efficiently separated using membranes from the ?carrier gas
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