{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/19611589"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "Following the 2 second pulse of tungsten-containing compound, the reducing gas, such as hydrogen gas (H2), and the carrier gas, such as argon (Ar), may continue to flow for about 2 seconds in order to purge the chamber of any reaction byproducts and reduce fluorine impurities on the substrate surface." ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.es" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/187458638"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/19611589" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/281611055"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/19611589"] } } }
