{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/355343554"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "In a first stage, a first metal sublayer is deposited on the seed layer at a current density and other conditions which yield a sublayer having a concave top surface as a result of the edge effect, i.e., a first deposition rate near the edge of the wafer is greater than a second deposition rate adjacent an interior region of the wafer." ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.com" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/319035112"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/355343554"] } } }
