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provhttp://www.w3.org/ns/prov#
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Subject Item
isa:1010388
rdf:type
prov:Entity
prov:value
As a material used for the metal layer 501 formed on the first substrate 500, a single layer made of an element selected from W, Ti, Ta, Mo, Nd, Ni, Co, Zr, Zn, Ru, Rh, Pd, Os, Ir and Pt or an alloy or a compound with the element as a main component or a laminate thereof, or a single layer made of a nitride thereof such as titanium nitride, tungsten nitride, tantalum nitride and molybdenum nitride
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n4:fr
Subject Item
isap:340538648
prov:wasDerivedFrom
isa:1010388