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More specifically, FIG. 10 is a plan view schematically showing a state wherein the bonded substrate stack 101 is set in the separating apparatus 100, FIG. 11 is a view of the arrangement shown in FIG. 10 when viewed from one side, FIG. 12 is a plan view schematically showing a state wherein the bonded substrate stack is to be separated, and FIG. 13 is a view of the arrangement shown in FIG. 12 wh
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