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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:105830662
rdf:type
prov:Entity
prov:value
To that end, each activation assembly 60a-60g includes at least one activation gas inlet conduit 66a-66d for introducing the inert activating gas, activating electrode plates such as 68a-d, 70a-d, and 72a-d, for energizing the inert activating gas, a precursor process gas inlet 74 for introducing precursor gas into the activation region 76a of activating assembly 60g, a density of states reducing
prov:wasQuotedFrom
n4:ca
Subject Item
isap:281611015
prov:wasDerivedFrom
isa:105830662