This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:107007511
rdf:type
prov:Entity
prov:value
Moreover, FIG. 13A is a plan view that shows an example in which the distance d1 is changeable, and FIG. 13B is a cross-sectional view taken along line X???X of FIG. 13A. The distance between the shortest resonator beam 5A among the three resonator beams 5A, 5B and 5C and the corresponding electrode 11A is made shortest, and the distance between the resonator beam 5B having an intermediate length
prov:wasQuotedFrom
n5:com
Subject Item
isap:250249874
prov:wasDerivedFrom
isa:107007511
Subject Item
isap:382559698
prov:wasDerivedFrom
isa:107007511