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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:108533168
rdf:type
prov:Entity
prov:value
To this end, the present invention is directed to a system for cleaning, etching or stripping substrate materials, such as semiconductor substrates in the form of silicon, gallium-arsenide, or silicon on sapphire wafers and other substrates, such as photolithographic masks, lenses, flat panel displays or other articles characterized by relatively flat surfaces which require removal of foreign mate
prov:wasQuotedFrom
n5:es
Subject Item
isap:353356684
prov:wasDerivedFrom
isa:108533168