This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:108806456
rdf:type
prov:Entity
prov:value
For example, on pages 382 to 388 of ???Journal of Applied Physics??? 1991, vol. 70, No. 1, disclosed is a technology of obtaining a (111)-oriented ferroelectric thin film, in which metal thin films formed of metals such as platinum (Pt) and iridium (Ir) are deposited at 500??? C. to obtain a (111)-oriented metal thin film, and a ferroelectric thin film such as PZT is deposited on this metal thin f
prov:wasQuotedFrom
n5:com
Subject Item
isap:464441125
prov:wasDerivedFrom
isa:108806456
Subject Item
isap:465410482
prov:wasDerivedFrom
isa:108806456