This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:117807668
rdf:type
prov:Entity
prov:value
After the island-shaped semiconductor regions' 315 and 316 are formed, a mask 318 is formed covering portions except for regions which subsequently become source or drain regions 321 of a TFT 301 and source or drain regions 322 of a TFT 302 to introduce an impurity imparting one conductivity type (see FIG. 27D).
prov:wasQuotedFrom
n5:com
Subject Item
isap:441197617
prov:wasDerivedFrom
isa:117807668