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PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
n4freepatentsonline.
Subject Item
isa:122373392
rdf:type
prov:Entity
prov:value
Wafer susceptors 168 are held in place via threaded rod 170 and conductive spacers 172, 174, and 176 made from suitable material such as metal or graphite.
prov:wasQuotedFrom
n4:com
Subject Item
isap:58445154
prov:wasDerivedFrom
isa:122373392
Subject Item
isap:292035027
prov:wasDerivedFrom
isa:122373392