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n4google.
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Subject Item
isa:124131723
rdf:type
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prov:value
a nitrided metal layer on the layer of titanium nitride, wherein the nitrided metal layer is of the form MTxNy, where M is a first metal component, T is a Group IIIA or Group IVA transition metal, N is nitrogen, x is an atomic fraction of T, y is an atomic fraction of N, x is less than approximately 0.1 andy is less than approximately 0.9; and
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n4:fr
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isap:516200052
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isa:124131723