This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

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PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:1257796
rdf:type
prov:Entity
prov:value
slurryUS684199129 Aug 200211 Jan 2005Micron Technology, Inc.Planarity diagnostic system, E.G., for microelectronic component test systemsUS68607988 Aug 20021 Mar 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS68693358 Jul 200222 Mar 2005Micron Technology, Inc.Retaining rings, planarizing app
prov:wasQuotedFrom
n5:au
Subject Item
isap:421373531
prov:wasDerivedFrom
isa:1257796
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:1257796