This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

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PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
n5patents.
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:127729266
rdf:type
prov:Entity
prov:value
combination SiH.sub.4 /NH.sub.3 /diluent where the diluent is gas such as helium or argon or even nitrogen.
prov:wasQuotedFrom
n5:com
Subject Item
isap:324463258
prov:wasDerivedFrom
isa:127729266
Subject Item
isap:404614569
prov:wasDerivedFrom
isa:127729266