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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:13255095
rdf:type
prov:Entity
prov:value
As described above, a metal film made of metals such as tantalum and tungsten and an alloy is so resistant to etching as to prevent substantial etching in chlorine-based dry etching containing oxygen ((Cl+O) based).
prov:wasQuotedFrom
n5:com
Subject Item
isap:375162015
prov:wasDerivedFrom
isa:13255095
Subject Item
isap:361375471
prov:wasDerivedFrom
isa:13255095
Subject Item
isap:358765996
prov:wasDerivedFrom
isa:13255095