This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:132981227
rdf:type
prov:Entity
prov:value
More particularly, the present invention relates to an exposure apparatus and the method of making the apparatus used in lithographic process, to transfer a pattern formed on a mask onto a substrate when manufacturing devices such as a semiconductor device, a pick up device (such as a CCD), a liquid crystal display device, and a thin-film magnetic head device.
prov:wasQuotedFrom
n4:com
Subject Item
isap:53286967
prov:wasDerivedFrom
isa:132981227