This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:135591538
rdf:type
prov:Entity
prov:value
Thus, it has also been determined that defects having the same causal relationship are likely to be statistically similar in their properties, such as location, proximity on the wafer, size and shape, as well as the shape of the defect pattern or cluster of defects resulting from the same causal mechanism.
prov:wasQuotedFrom
n4:es
Subject Item
isap:58325066
prov:wasDerivedFrom
isa:135591538