This HTML5 document contains 6 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
n5freepatentsonline.
Subject Item
isa:139530246
rdf:type
prov:Entity
prov:value
polymer, spin-on glass, oxynitride, polyimide, photoresist or removable organics or other materials that can act as a sacrificial layer and be removed by etching to provide a gap between the metal layers.
prov:wasQuotedFrom
n5:com
Subject Item
isap:298706206
prov:wasDerivedFrom
isa:139530246
Subject Item
isap:463016188
prov:wasDerivedFrom
isa:139530246
Subject Item
isap:413370693
prov:wasDerivedFrom
isa:139530246