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PrefixNamespace IRI
n5freshpatents.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:14996252
rdf:type
prov:Entity
prov:value
In some example embodiments, the metal may comprise copper, tungsten, aluminum, ruthenium, platinum, titanium, tantalum, alloys thereof and other metals, and the metal nitride may comprise tungsten nitride, tantalum nitride, or titanium nitride.
prov:wasQuotedFrom
n5:com
Subject Item
isap:363606097
prov:wasDerivedFrom
isa:14996252
Subject Item
isap:375162015
prov:wasDerivedFrom
isa:14996252
Subject Item
isap:122776852
prov:wasDerivedFrom
isa:14996252
Subject Item
isap:361154804
prov:wasDerivedFrom
isa:14996252
Subject Item
isap:361375471
prov:wasDerivedFrom
isa:14996252