This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
n5freepatentsonline.
Subject Item
isa:151147007
rdf:type
prov:Entity
prov:value
Further, it would be advantageous if the MEM resonator fabrication process was compatible with not only silicon CMOS integration but the manufacturing of MEM resonators from materials offering enhanced performance compared to silicon such as ceramics including silicon carbide, silicon dioxide, and silicon nitride, and carbon including thin-film diamond.
prov:wasQuotedFrom
n5:com
Subject Item
isap:435997096
prov:wasDerivedFrom
isa:151147007
Subject Item
isap:430722550
prov:wasDerivedFrom
isa:151147007