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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:157405867
rdf:type
prov:Entity
prov:value
tionally, for example, the metal cap layer 115 can comprise a nitride or carbide material, such as silicon nitride (Si3N4) or silicon carbide (SiC) or silicon carbonitride (SiCN) or silicon oxycarbonitride (SiCON), or combinations thereof, or other films suitable as a metal diffusion barrier.
prov:wasQuotedFrom
n4:com
Subject Item
isap:431582150
prov:wasDerivedFrom
isa:157405867