This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:159886405
rdf:type
prov:Entity
prov:value
tusUS707411416 janv. 200311 juil. 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS708349717 janv. 20061 ao???t 2006Strasbaugh, Inc.Polishing pad with built-in optical sensorUS70869279 mars 20048 ao???t 2006Micron Technology, Inc.Methods and systems for planarizing workpieces, e.g., microelectronic wo
prov:wasQuotedFrom
n5:fr
Subject Item
isap:447138768
prov:wasDerivedFrom
isa:159886405
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:159886405