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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:160018317
rdf:type
prov:Entity
prov:value
It has been found that silicon oxide layers can be deposited at high rates and low dielectric precursor pressures on a substrate by evacuating a chamber, introducing into the chamber the substrate, oxygen and a dielectric precursor which has the formula ##STR3## wherein x is an integer of 1 to 4 and each R is independently selected from the group consisting of H, --CH3 and --C2 H5, and activating
prov:wasQuotedFrom
n4:com
Subject Item
isap:299184883
prov:wasDerivedFrom
isa:160018317