This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:160322983
rdf:type
prov:Entity
prov:value
It is now disclosed for the first time a method of manufacturing a structure (such as a microstructure), the method comprising providing a substrate having a substantially planar surface, forming an elongated at least partially buried channel below said planar surface, filling said channel with a second material other than said material, said filant extending through and at least partially filling
prov:wasQuotedFrom
n5:au
Subject Item
isap:61168615
prov:wasDerivedFrom
isa:160322983