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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:160563854
rdf:type
prov:Entity
prov:value
FIGS. 5A to 5E are diagrams showing step by step a manufacturing method of a semiconductor memory device in accordance with the present invention, and FIG. 6 is a plan view of a semiconductor memory device showing one embodiment of the present invention, and the sectional view of the portion taken along the line A--A in FIG. 6 corresponds to FIG. 5E. As shown in FIG. 5A, a silicon oxide film 2 and
prov:wasQuotedFrom
n4:com
Subject Item
isap:151275828
prov:wasDerivedFrom
isa:160563854