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thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatusUS707411416 Jan 200311 Jul 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS708349717 Jan 20061 Aug 2006Strasbaugh, Inc.Polishing pad with built-in optical sensorUS70869279 Mar 20048 Aug 2006
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