This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:16277565
rdf:type
prov:Entity
prov:value
y 17, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6962520Aug 24, 2004Nov 8, 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS7019512Aug 31, 2004Mar 28, 2006Micron Technology, Inc.Planarity di
prov:wasQuotedFrom
n5:com
Subject Item
isap:421373531
prov:wasDerivedFrom
isa:16277565
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:16277565